Method of carrier profiling in semiconductors
Patent ID:
US-10401382-B2
Published:
September 2019
Category:
Electronics & Technology
Abstract
The superimposition of a periodic potential wave to the tip movement control or the bias supply of an STM, in which a microwave frequency comb is generated in its tunneling junction, may be used to reduce or eliminate artifacts or other noise generated from outside the tunneling junction.
Patent Details
Image Pages:
5
External Resources
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